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What is a Cleanroom?

Cleanroom Overview | Cleanroom Air Flow Principles | Cleanroom Classifictations | US Fed STD 209E Cleanroom Standards
BS 5295 Cleanroom Standards | ISO 14644-1 Cleanroom Standards

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Typically used in manufacturing or scientific research, a cleanroom is a controlled environment that has a low level of pollutants such as dust, airborne microbes, aerosol particles, and chemical vapors. To be exact, a cleanroom has a controlled level of contamination that is specified by the number of particles per cubic meter at a specified particle size. The ambient air outside in a typical city environment contains 35,000,000 particles per cubic meter, 0.5 mm and larger in diameter, corresponding to an ISO 9 cleanroom which is at the lowest level of cleanroom standards.

Cleanroom Overview

Cleanrooms can be a variety of sizes. Entire manufacturing facilities can be contained within a cleanroom with the area covering thousands of square feet. They are used extensively in semiconductor manufacturing, biotechnology, the life sciences, pharmaceutical, semiconductor, electronic, optics, military/ aerospace, medical, pharmacy, FDA validatable, manufacturing/industrial, packaging industries, and other fields that are very sensitive to environmental contamination.

Cleanroom air coming from an outside source is filtered to eliminate dust, and the inside air is recirculated constantly through HEPA air filters and/or ultra-low particulate air (ULPA) filters that remove containments produced from within the cleanroom.

Personnel enter and leave cleanrooms through airlocks (sometimes including an air shower stage), and wear protective clothing such as hats, face masks, gloves, boots and coveralls.

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The equipment inside a cleanroom is designed to generate minimal air contamination. There are even specialized mops and buckets. Cleanroom furniture is also designed to produce a minimum of particles and to be easy to clean.

Since common materials such as paper, pencils, and fabrics made from natural fibers are often excluded, there are alternatives available. Cleanrooms are not a sterile environment (i.e., free of uncontrolled microbes). The attention is to controlling airborne particles. Particle levels are tested using a particle counter.

Some cleanrooms are kept at a positive pressure so that if any leaks are present, air leaks out of the chamber instead of unfiltered air coming in. Some cleanroom HVAC systems control the humidity to low levels so extra equipment called ionizers are necessary to prevent electrostatic discharge (ESD) problems.

Cleanroom clothing is used to prevent substances from being released off the wearer's body from contaminating the environment. The cleanroom clothing itself must not release particles or fibres to prevent contamination of the environment by personnel. This type of personnel contamination can degrade product performance in the semiconductor and pharmaceutical industries and it can cause cross-infection between medical staff and patients in the health care industry, for example.

Cleanroom clothing performance is also an important issue. Penetration through fabrics, seams and fasteners, and leakage between the clothing and the body must be prevented. Leakage can occur at any point where there is a gap between the wearer's body and the equipment and/or clothing. Face mask performance can also be limited by leakage of this type. Clothing penetration can also occur from pressure differences between the inside and outside of the garments which result from body movements. Air flow into cleanroom garments can contaminate the body, and airflow out of the garment can contaminate the cleanroom environment.

Cleanroom garments include boots, shoes, aprons, beard covers, bouffant caps, coveralls, face masks, frocks/lab coats, gowns, glove and finger cots, hairnets, hoods, sleeves and shoe covers. The type of cleanroom garments used should reflect the cleanroom and product specifications. Low-level cleanrooms may only require special shoes having completely smooth soles that do not track in dust or dirt. However, shoe bottoms must not create slipping hazards since safety always takes precedence. A cleanroom suite is usually required for entering a cleanroom. Class 10,000 cleanrooms may use simple smocks, head covers, and booties. For Class 10 cleanrooms, careful gown wearing procedures with a zipped cover all, boots, gloves and complete respirator enclosure are required.

In other cleanrooms where the air contamination standards are less rigorous, the entrance to the cleanroom may not have an air shower. There is an anteroom, which is also known as a gray room, where special suits must be put on allowing a person to directly walk into the cleanroom. Rather than using fully classified cleanrooms, some facilities use some cleanroom practices together to maintain their cleanliness requirements.

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Cleanroom Air Flow Principles

Cleanrooms maintain particulate-free air through the use of either HEPA or ULPA filters employing laminar or turbulent air flow principles. Laminar, or unidirectional, air flow systems direct filtered air downward in a constant stream towards filters located on walls near the cleanroom floor. Laminar air flow systems are typically employed across 80% of a cleanroom ceiling to maintain constant air processing. Stainless steel or other non-shed materials are used to construct laminar air flow filters and hoods to prevent excess particles entering the air. Turbulent, or non-unidirectional, air flow uses both laminar air flow hoods and non-specific velocity filters to keep air in a cleanroom in constant motion, although not all in the same direction. The rough air seeks to trap particles that may be in the air and drive them towards the floor, where they enter filters and leave the cleanroom environment.

Cleanroom Classifications

Cleanrooms are classified by how clean the air is. In Federal Standard 209 (A to D) of the USA, the number of particles equal to and greater than 0.5mm is measured in one cubic foot of air, and this count is used to classify the cleanroom. This metric nomenclature is also accepted in the most recent 209E version of the Standard. Federal Standard 209E is used domestically. The newer standard is TC 209 from the International Standards Organization. Both standards classify a cleanroom by the number of particles found in the laboratory's air. The cleanroom classification standards FS 209E and ISO 14644-1 require specific particle count measurements and calculations to classify the cleanliness level of a cleanroom or clean area. In the UK, British Standard 5295 is used to classify cleanrooms. This standard is about to be superseded by BS EN ISO 14644-1.

Cleanrooms are classified according to the number and size of particles permitted per volume of air. Large numbers like "class 100" or "class 1000" refer to FED_STD-209E, and denote the number of particles of size 0.5 mm or larger permitted per cubic foot of air. The standard also allows interpolation, so it is possible to describe e.g. "class 2000."

Small numbers refer to ISO 14644-1 standards, which specify the decimal logarithm of the number of particles 0.1 µm or larger permitted per cubic metre of air. So, for example, an ISO class 5 cleanroom has at most 105 = 100,000 particles per m³.

Both FS 209E and ISO 14644-1 assume log-log relationships between particle size and particle concentration. For that reason, there is no such thing as zero particle concentration. Ordinary room air is approximately class 1,000,000 or ISO 9.

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US FED STD 209E Cleanroom Standards

Class maximum particles/ft3 ISO
equivalent
>=0.1 µm >=0.2 µm >=0.3 µm >=0.5 µm >=5 µm
1 35 7 3 1   ISO 3
10 350 75 30 10   ISO 4
100   750 300 100   ISO 5
1,000       1,000 7 ISO 6
10,000       10,000 70 ISO 7
100,000       100,000 700 ISO 8

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BS 5295 Cleanroom Standards

  maximum particles/m3
Class >=0.5 µm >=1 µm >=5 µm >=10 µm >=25 µm
Class 1 3,000   0 0 0
Class 2 300,000   2,000 30  
Class 3   1,000,000 20,000 4,000 300
Class 4     20,000 40,000 4,000

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ISO 14644-1 Cleanroom Standards

Class maximum particles/m3 FED STD 209E
equivalent
>=0.1 µm >=0.2 µm >=0.3 µm >=0.5 µm >=1 µm >=5 µm
ISO 1 10 2          
ISO 2 100 24 10 4      
ISO 3 1,000 237 102 35 8   Class 1
ISO 4 10,000 2,370 1,020 352 83   Class 10
ISO 5 100,000 23,700 10,200 3,520 832 29 Class 100
ISO 6 1,000,000 237,000 102,000 35,200 8,320 293 Class 1,000
ISO 7       352,000 83,200 2,930 Class 10,000
ISO 8       3,520,000 832,000 29,300 Class 100,000
ISO 9       35,200,000 8,320,000 293,000 Room Air

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Clean Air Technology, Inc. | Designs, Builds and Installs Cleanrooms