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Cleanroom Standards - ISO 14644-1 - BS 5295

ISO 14644-1 Cleanroom Standards

Class maximum particles/m3 FED STD 209E
equivalent
>=0.1 µm >=0.2 µm >=0.3 µm >=0.5 µm >=1 µm >=5 µm
ISO 1 10 2          
ISO 2 100 24 10 4      
ISO 3 1,000 237 102 35 8   Class 1
ISO 4 10,000 2,370 1,020 352 83   Class 10
ISO 5 100,000 23,700 10,200 3,520 832 29 Class 100
ISO 6 1,000,000 237,000 102,000 35,200 8,320 293 Class 1,000
ISO 7       352,000 83,200 2,930 Class 10,000
ISO 8       3,520,000 832,000 29,300 Class 100,000
ISO 9       35,200,000 8,320,000 293,000 Room Air

BS 5295 Cleanroom Standards

  maximum particles/m3
Class >=0.5 µm >=1 µm >=5 µm >=10 µm >=25 µm
Class 1 3,000   0 0 0
Class 2 300,000   2,000 30  
Class 3   1,000,000 20,000 4,000 300
Class 4     20,000 40,000 4,000

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